Precision Robotic Stage
X-Y-Z
분해능: 10 nm
이동범위(X-Y-Z) : ± 5 mm
이동 각도범위(roll-pitch-yaw): ± 10°
크기 : 68 mm
무게: 505 g
가반하중: 500 g
X-Y-Rx
분해능: 0.5 µm
이동범위(X-Y-Z) : ± 75 mm
이동 각도범위(roll-pitch-yaw): ± 30°
크기 : 350 mm
무게: 32kg
가반하중: 200 kg
X-Y-Z
분해능: 0.2 µm
이동범위(X-Y-Z) : ± 65 mm
이동 각도범위(roll-pitch-yaw): ± 5°
크기 : 600 mm
무게: 200kg
가반하중: 500 kg
Portal for inspections
X-Y-Z
분해능: 0.1 µm
이동범위(X-Y-Z) : ± 65 mm
이동 각도범위(roll-pitch-yaw): ± 3°
크기 : 1200 mm
무게: 1500 kg
가반하중: 1500 kg
Surface Aligner
X-Y-Rx
분해능 : 0.1 µm
이동범위(X-Y-Z) : ± 20 mm
이동 각도범위(roll-pitch-yaw) : ± 15°
크기 : 145 mm
무게: 4.3kg
가반하중: 10kg
Z-Rx-Ry
분해능: 50 nm
이동범위(X-Y-Z) : ± 200 mm
이동 각도범위(roll-pitch-yaw): ± 20°
크기 : 640 mm
무게: 96 kg
가반하중: 400 kg
XYZ laser gantry
X-Y-Z
분해능: 0.1 µm
이동범위(X-Y-Z) : ± 65 mm
이동 각도범위(roll-pitch-yaw): ± 3°
크기 : 1200 mm
무게: 1500 kg
가반하중: 1500 kg
Double Portal for inspections
X-Y-Z
분해능: 0.1 µm
이동범위(X-Y-Z) : ± 65 mm
이동 각도범위(roll-pitch-yaw): ± 3°
크기 : 1200 mm
무게: 1500 kg
가반하중: 1500 kg
X-Y-Z-Rx-Ry
분해능 : 0.5 µm
이동범위(X-Y-Z) : ± 30 mm
이동 각도범위(roll-pitch-yaw) : ± 20°
크기 : 200 mm
무게 : 5.6kg
가반하중 : 20kg
3-Axis Piezo Motor System
분해능: 0.5 µm
이동범위(X-Y-Z) : ± 100 mm
이동 각도범위(roll-pitch-yaw): ± 20°
크기 : 750 mm
무게: 85 kg
가반하중: 200 kg
X-Y-Z
분해능: 0.2 µm
이동범위(X-Y-Z) : ± 65 mm
이동 각도범위(roll-pitch-yaw): ± 1.5°
크기 : 450 mm
무게: 120 kg
가반하중: 500 kg
Multi Head Gantry
X-Y-Z
분해능: 0.1 µm
이동범위(X-Y-Z) : ± 65 mm
이동 각도범위(roll-pitch-yaw): ± 3°
크기 : 1200 mm
무게: 1500 kg
가반하중: 1500 kg
NEWS
NEW VIDEO DIFFRACTOMETER
New video presenting our high vacuum diffractometer, integrating a BORA and a JORAN hexapods, for the Synchrotron SOLEIL.
It was designed for the SIRIUS beamline at the Synchrotron SOLEIL in order to improve existing equipment and offer new opportunities for evolution to users.
Feel free to ask us for more information, or visit our synchrotron HV diffractometer page.
NEW VIDEO NON-MAGNETIC HEXAPOD
new video presenting our non-magnetic hexapod, allowing to perform experiments on ions trapped with a 2 tesla magnet.
Designed to position an 80 kg payload, this customized non-magnetic hexapod is aligning a UHV chamber in the 6 degrees of freedom in order to be collinear with the symmetry axis of the 2 teslas magnet and trap atomic ions.
It offers travel ranges of 10 mm in translation and 4° in rotation while having a very low profile: its height is only 155 mm in mid position. Its repeatability is ± 0.6 μm at the pivot point, which is 600 mm away from the hexapod.
Actually, it is a hexaglide. It is very similar to a hexapod, also known as a Stewart platform. But instead of variable length actuators, it has constant length bars linking the mobile platform to six linear motors distributed on a fixed platform.
NEW VIDEO BREVA V
new video presenting our BREVA V hexapod (V for velocity), combining dynamics and precision.
Used to test the resistance of materials for example, it can reach speeds of 50 mm/s in translation and 20°/s in rotation.
Its resolution is 1 µm in translation and 9 µrad in rotation.
© 2016 by INNOTICS,Inc.