Precision Robotic Stage

Multi-Axis System HT-KT210

X-Y-Z

분해능: 10 nm 

이동범위(X-Y-Z) : ± 5 mm 

이동 각도범위(roll-pitch-yaw): ± 10° 

크기 : 68 mm 

무게: 505 g 

가반하중: 500 g

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Parallel kinematic Airbearing 

X-Y-Rx

분해능: 0.5 µm 

이동범위(X-Y-Z) : ± 75 mm 

이동 각도범위(roll-pitch-yaw): ± 30° 

크기 : 350 mm 

무게: 32kg 

가반하중: 200 kg

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XYZ adjustment with aperture

X-Y-Z

분해능: 0.2 µm 

이동범위(X-Y-Z) : ± 65 mm 

이동 각도범위(roll-pitch-yaw): ± 5° 

크기 : 600 mm 

무게: 200kg 

가반하중: 500 kg

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Portal for inspections

X-Y-Z

High Payload, precision

분해능: 0.1 µm 

이동범위(X-Y-Z) : ± 65 mm 

이동 각도범위(roll-pitch-yaw): ± 3° 

크기 : 1200 mm 

무게: 1500 kg 

가반하중: 1500 kg

Surface Aligner

X-Y-Rx

분해능 : 0.1 µm 

이동범위(X-Y-Z) : ± 20 mm 

이동 각도범위(roll-pitch-yaw) : ± 15° 

크기 : 145 mm 

무게: 4.3kg

가반하중: 10kg

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3-Axis Aligner MP200-3

Z-Rx-Ry

분해능:  50 nm 

이동범위(X-Y-Z) : ± 200 mm 

이동 각도범위(roll-pitch-yaw): ± 20° 

크기 : 640 mm 

무게: 96 kg 

가반하중: 400 kg

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XYZ laser gantry

X-Y-Z

분해능: 0.1 µm 

이동범위(X-Y-Z) : ± 65 mm 

이동 각도범위(roll-pitch-yaw): ± 3° 

크기 : 1200 mm 

무게: 1500 kg 

가반하중: 1500 kg

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Double Portal for inspections

X-Y-Z

High Payload, precision

분해능: 0.1 µm 

이동범위(X-Y-Z) : ± 65 mm 

이동 각도범위(roll-pitch-yaw): ± 3° 

크기 : 1200 mm 

무게: 1500 kg 

가반하중: 1500 kg

5-Axis Manipulator MP200-5

X-Y-Z-Rx-Ry

분해능 : 0.5 µm

이동범위(X-Y-Z) : ± 30 mm 

이동 각도범위(roll-pitch-yaw) : ± 20° 

크기 : 200 mm 

무게 : 5.6kg 

가반하중 : 20kg

자세히 보기

3-Axis Piezo Motor System

X-Y-Rz 

분해능: 0.5 µm 

이동범위(X-Y-Z) : ± 100 mm 

이동 각도범위(roll-pitch-yaw): ± 20° 

크기 : 750 mm 

무게: 85 kg 

가반하중: 200 kg

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gantry for measuring

X-Y-Z

분해능: 0.2 µm 

이동범위(X-Y-Z) : ± 65 mm 

이동 각도범위(roll-pitch-yaw): ± 1.5° 

크기 : 450 mm 

무게: 120 kg 

가반하중: 500 kg

자세히 보기

Multi Head Gantry

X-Y-Z

High Payload, precision

분해능: 0.1 µm 

이동범위(X-Y-Z) : ± 65 mm 

이동 각도범위(roll-pitch-yaw): ± 3° 

크기 : 1200 mm 

무게: 1500 kg 

가반하중: 1500 kg

NEWS

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NEW VIDEO DIFFRACTOMETER

New video presenting our high vacuum diffractometer, integrating a BORA and a JORAN hexapods, for the Synchrotron SOLEIL.


It was designed for the SIRIUS beamline at the Synchrotron SOLEIL in order to improve existing equipment and offer new opportunities for evolution to users. Feel free to ask us for more information, or visit our synchrotron HV diffractometer page.

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NEW VIDEO NON-MAGNETIC HEXAPOD

new video presenting our non-magnetic hexapod, allowing to perform experiments on ions trapped with a 2 tesla magnet.


Designed to position an 80 kg payload, this customized non-magnetic hexapod is aligning a UHV chamber in the 6 degrees of freedom in order to be collinear with the symmetry axis of the 2 teslas magnet and trap atomic ions. It offers travel ranges of 10 mm in translation and 4° in rotation while having a very low profile: its height is only 155 mm in mid position. Its repeatability is ± 0.6 μm at the pivot point, which is 600 mm away from the hexapod. Actually, it is a hexaglide. It is very similar to a hexapod, also known as a Stewart platform. But instead of variable length actuators, it has constant length bars linking the mobile platform to six linear motors distributed on a fixed platform.

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NEW VIDEO BREVA V

new video presenting our BREVA V hexapod (V for velocity), combining dynamics and precision.


Used to test the resistance of materials for example, it can reach speeds of 50 mm/s in translation and 20°/s in rotation. Its resolution is 1 µm in translation and 9 µrad in rotation.

© 2016 by INNOTICS,Inc.