Piezo Stage System
Highly Dynamic & Precision Motion
XY25XS
이동범위(µm) : 25 x 25
크기(mm): 20 x 50 x 50
분해능 : 2.5nm
Response Time : 0.17ms
Options : Strain Gauges, Vacuum
X60S
이동범위(µm) : 55
크기(mm): 12 x 30 x 30
분해능 : 5.5nm
Response Time : 0.27ms
Options : Strain Gauges, Vacuum
XY200M
이동범위(µm) : 200 x 200
크기(mm): 22 x 100 x 100
분해능 : 2.0nm
Response Time : 0.86ms
Options : Strain Gauges, Vacuum
X120S
이동범위(µm) : 138
크기(mm): 12 x 30 x 30
분해능 : 11nm
Response Time : 0.59ms
Options : Strain Gauges, Vacuum
XYZ200M
이동범위(µm) : 35.4µm
크기(mm): 48 x 10 x 9
분해능 : 1.8nm
Response Time : 1.32ms
Options : Strain Gauges, Vacuum
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