Piezo Stage System

Highly Dynamic & Precision Motion 

HOME > PRODUCT > Piezo Product < Piezo Stage

XY25XS

이동범위(µm) : 25 x 25

크기(mm): 20 x 50 x 50

분해능 : 2.5nm

Response Time : 0.17ms 

Options : Strain Gauges, Vacuum   

DATASHEET

X60S

이동범위(µm) : 55 

 크기(mm): 12 x 30 x 30  

분해능 : 5.5nm 

Response Time : 0.27ms 

 Options : Strain Gauges, Vacuum   

DATASHEET

XY200M

이동범위(µm) : 200 x 200 

 크기(mm): 22 x 100 x 100 

분해능 : 2.0nm

Response Time : 0.86ms

Options : Strain Gauges, Vacuum   

DATASHEET

X120S

이동범위(µm) : 138 

 크기(mm): 12 x 30 x 30  

분해능 : 11nm 

Response Time : 0.59ms 

 Options : Strain Gauges, Vacuum   

DATASHEET

XYZ200M

이동범위(µm) : 35.4µm 

크기(mm): 48 x 10 x 9

분해능 : 1.8nm

Response Time : 1.32ms 

Options : Strain Gauges, Vacuum   

DATASHEET

HOME > PRODUCT > Piezo Product < Piezo Stage

© 2016 by INNOTICS,Inc